Subject description - XP34MSA

Summary of Study | Summary of Branches | All Subject Groups | All Subjects | List of Roles | Explanatory Notes               Instructions
XP34MSA Microsystems and Microactuators
Roles:S Extent of teaching:2P
Department:13134 Language of teaching:CS
Guarantors:Husák M. Completion:ZK
Lecturers:Husák M. Credits:3
Tutors:Husák M. Semester:

Anotation:

The course deals with system integration applied in the design of digital and analog systems with application of system engineering, in i tis solved interconnection of various types of modern electronic systems on a chip as well as external. The course shows new possibilities of realization and application of integrated micro-components working with various physical principles and quantities using mainly MEMS technology, increasing reliability with all its attributes. The course introduces modern elements - microactuators with various principles of their activities including basic applications in industry, medicine, regulation, automotive control, etc. Basic elements of nanotechnology and nanoelectronic structures are mentioned here. The subject extends students' expertise with the latest multidisciplinary chip elements and their wide use in information technologies, IoT, biomedicine, aerospace, automotive industry etc.

Study targets:

Subject is organized in the form of lectures or consultations depending on the number of students enrolled. Lectures are focused on obtaining information about perspective directions of electronics, exercises are focused on design and realization of micro-systems related to the dissertation. Study materials, literature, hardware, and available software designs (running on a parallel computing cluster) are used for student work. The course is concluded with a presentation of the completed project accompanied by an oral examination.

Content:

The subject brings together various fields on the chip (electronics, photonics, mechanics, biochemistry.), the subject provides information on the development of new structures and systems on the chip and their applications, the subject includes information on new microsystem technologies applied in information technologies, IoT and other important areas. The subject uses knowledge gained in professional subjects of the Master's study programs EK and OES. The course is organized in a dynamic way and therefore the course is intended for students from other study programs. Courses of a similar type are included in courses of a number of prestigious universities: MIT: 6.717 [J] Design and Fabrication of Microelectromechanical Systems (http://catalog.mit.edu/degree-charts/electrical-science-engineering-course-6-1/) Berkeley: EE 147. Introduction to Microelectromechanical Systems (MEMS) (https://www2.eecs.berkeley.edu/Courses/EE147/) ETH Zurich: 151-0621-00L Microsystems I: Process Technology and Integration, 636-0203-00L Lab Course: Microsystems and Microfluidics in Biology, 636-0114-00L Microsensors and Microsystems, 151-0172-00 For Microsystems II: Devices and Applications, 151-0642-00L Micro and Nanosystems Seminar (https://www.eth.ch/en/studies.html)

Course outlines:

1. Microsystems structures, energy domains, importance, interdisciplinary, applications, system integration of digital and analog systems, multi-chip configuration
2. Physical phenomena, design methods, interconnection of systems-on-chip and external devices, process control, communication and evaluation, system reliability and its increasing by integration
3. Micro-actuators parameters, scaling
4. Tactile sensors and touch screens, biometric devices, from graphite to graphene
5. Basic mechanisms and structures used in micro-actuators
6. Electrostatic linear and rotary actuators components - basic physical principles and application
7. Electrostatic micromanipulators and micro-motors
8. Piezoelectric micro-actuators mechanisms, micro-motors and micromanipulators
9. Heat and magnetic principle - micro-actuators mechanisms
10. Mechanical Systems and micro-actuators mechanisms
11. Chemical and biochemical principles - micro-actuators mechanisms, intelligent microsystems structures for chemical and biochemical analysis, Lab-on-Chip
12. RF MEMS and MOEMS structures, (electronic switches, filters, optical switches, optical mirrors, tunable capacitors, etc.)
13. Micro-generators based on Energy Harvesting
14. Nanoscale systems

Exercises outline:

1. Introduction, organization of the seminars, introduction to safety in work
2. Introduction to the programs ANSYS/Coventorware
3. Simulation and modeling of basic MEMS structures in ANSYS /Coventorware
4. Simulation and modeling of basic MEMS structures in ANSYS /Coventorware
5. Design and Simulation and modeling of basic MEMS structures in ANSYS /Coventorware
6. Design and realization of microsystem structure in CTU/FEE technology (device purchased from the project 2018)
7. Design and realization of microsystem structure in CTU/FEE technology (device purchased from the project 2018)
8. Realization of microsystem structure in CTU/FEE technology (device purchased from the project 2018)
9. Realization of microsystem structure in CTU/FEE technology (device purchased from the project 2018)
10. Realization of microsystem structure (strain gauge) using the material printer
11. Characterization of realized the MEMS structures (device purchased from the project 2018)
12. Measurement of the MEMS structures (device purchased from the project 2018)
13. Presentation of semester projects
14. Presentation of semester projects

Literature:

Obligatory references:
[1] Arnaldo D Amico et al: Sensors and Microsystems, Springer 2014, EAN 97814 899 9944 3, ISBN 1489999442
[2] Senturia Stephen, Microsystem Design, Springer 2004, SBN-13: 978-0792372462
Recommended references:
[1] Tai-Ran Hsu: MEMS And Microsystems: Design And Manufacture, McGraw Hill Education; 2017, ISBN-13: 978-0070487093
[2] Chang Liu: Foundations of MEMS, Pearson Education 2011, ISBN-13: 978-8131764756
[3] Iniewski Krzysztof: Integrated Microsystems: Electronics, Photonics, and Biotechnology, CRC Press, 2017, ISBN 9781138076228
Doporučená literatura:
[1] Tai-Ran Hsu: MEMS And Microsystems: Design And Manufacture, McGraw Hill Education; 2017, ISBN-13: 978-0070487093
[2] Chang Liu: Foundations of MEMS, Pearson Education 2011, ISBN-13: 978-8131764756
[3] Iniewski Krzysztof: Integrated Microsystems: Electronics, Photonics, and Biotechnology, CRC Press, 2017, ISBN 9781138076228

Requirements:

Keywords:

Microsystems, microactuators, MEMS, MOEMS, RF MEMS, systems-on-chip, Tactile sensors, touch displays, electrostatic, piezoelectric, Heat and magnetic microactuators, chemical and biochemical microactuators, intelligent microsystems structures, Lab-on-Chip

Subject is included into these academic programs:

Program Branch Role Recommended semester
DOKP Common courses S
DOKK Common courses S


Page updated 15.6.2024 17:51:22, semester: Z/2024-5, Z,L/2023-4, Send comments about the content to the Administrators of the Academic Programs Proposal and Realization: I. Halaška (K336), J. Novák (K336)