Subject description - XP34MSY

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XP34MSY Microsystems
Roles:S Extent of teaching:2P+2C
Department:13134 Language of teaching:CS
Guarantors:Husák M. Completion:ZK
Lecturers:Husák M. Credits:4
Tutors:Bouřa A. Semester:Z,L

Web page:


Fundamental concepts and classification of microsystems. Micro-sensors. Micro-actuators. Signal processing within the system. MEMS (micro-electrical-mechanical structures). MOES (micro-optical-electrical structures). MEMOS (micro-electrical-mechanical-optical structures). Microsystem design. Microsystem modelling. Manufacturing technologies. Materials. Industrial applications. Medical applications.

Course outlines:

1. Fundamental concepts and classification of microsystems
2. Microsystems within the European research and their market chances
3. Micro-sensors
4. Micro-actuators
5. Signal processing within the system
6. MEMS (micro-electrical-mechanical structures)
7. MOES (micro-optical-electrical structures)
8. MEMOS (micro-electrical-mechanical-optical structures)
9. Microsystem design
10. Microsystem modelling
11. Manufacturing technologies
12. Materials
13. Industrial applications
14. Medical applications

Exercises outline:



1. Beeby,S., Ensell,G., Kraft,M., White,N.: MEMS Mechanical Sensors. Artech
House, Boston, 2004.
2. Pelesko,J.A., Bernstein,D.H.: Modeling MEMS and NEMS. Chapman & Hall/CRC,
Boca Raton, 2003.
3. Varadan,V.K., Vinoy,K.J., Jose,K.A.: RF MEMS and their applications.
Wiley, Chichester, 2003.



Subject is included into these academic programs:

Program Branch Role Recommended semester
DOKP Common courses S
DOKK Common courses S

Page updated 15.6.2024 17:51:22, semester: Z/2024-5, Z,L/2023-4, Send comments about the content to the Administrators of the Academic Programs Proposal and Realization: I. Halaška (K336), J. Novák (K336)