Subject description - XP35DTF

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XP35DTF Thin film diagnostics
Roles:  Extent of teaching:2P+2L
Department:13135 Language of teaching:EN
Guarantors:Polcar T. Completion:Z,ZK
Lecturers:Polcar T. Credits:4
Tutors:Polcar T. Semester:L

Anotation:

Surface characterization. Definition of a thin film. Deposition methods; chemical vapor deposition, physical vapor deposition. Thin film characterization: optical methods; electron diffraction. Ion implantation. X-ray diffraction and photoelectron spectroscopy. Thickness, mechanical, optical and electrical properties.

Study targets:

The main goal is to provide an overview of analytical methods focused mainly on thin films deposited by chemical and physical vapor deposition.

Course outlines:

1. Ideal and real surface, surface roughness, surface characterization
2. Definition of thin film, Chemical Vapor Deposition
3. Physical Vapor Deposition, Growth of thin films
4. Optical Methods, AFM
5. Electron Diffraction, LEED and RHEED methods
6. Scanning Electron Microscopy (SEM), Energy-Dispersive X-ray Spectroscopy
7. Auger Electron Spectroscopy (AES), Transmission Electron Microscopy (TEM)
8. Ion implantation, Secondary Ion Mass Spectroscopy (SIMS)
9. Rutherford Backscattering Spectroscopy (RBS), Elastic Recoil Detection Analysis (ERDA)
10. X-ray Diffraction, X-ray Photoelectron spectroscopy
11. Thickness measurements
12. Mechanical properties
13. Optical and electrical properties

Exercises outline:

PhD students will visit research laboratories and carry out simple measurements on selected samples (AFM, SEM/EDX, XRD, Raman, etc).

Literature:

1. Surface Analysis: The Principal Techniques, John C. Vickerman, Ian Gilmore (Editors), Wiley, 2nd edition, 2009, ISBN 0470017643
2. Surface Analysis Methods in Materials Science, D.J. O'Connor, Brett A. Sexton, Roger S.C. Smart (Editors) , Springer, 2nd edition, 2010, ISBN 3642074588

Requirements:

Note:

Required literature is supplied by lecturer.

Keywords:

Surface analysis; thin film; deposition methods; microscopy

Subject is included into these academic programs:

Program Branch Role Recommended semester

Page updated 14.3.2025 15:51:22, semester: Z,L/2025-6, Z,L/2024-5, Send comments about the content to the Administrators of the Academic Programs Proposal and Realization: I. Halaška (K336), J. Novák (K336)
Responsible person: prof. Ing. Jiří Jakovenko, Ph.D.