Subject description - BE2M34MST

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BE2M34MST Microsystems
Roles:P Extent of teaching:2P+2L
Department:13134 Language of teaching:EN
Guarantors:Husák M. Completion:Z,ZK
Lecturers:Husák M., Laposa A. Credits:6
Tutors:Bouřa A. Semester:L

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The course deals with system integration applied in the design of digital and analog systems. It demonstrates the new possibilities of implementation and application of integrated microelectronic devices based on various physical and biochemical principles. It presents primarily MEMS technology that increases reliability with all its attributes. The course presents the modern action elements and microactuators, whose operation is based on fundamental physical and biochemical principles, including basic applications in micromanipulation, microrobots, microdrives, microsurgery, multimedia, medical, industrial control, automotive, etc. In the course are presented the principles of touch screens, microgenerators of electrical energy. There are mentioned basic elements of the use of nanotechnology and nanoelectronic structures and basic microsystem technologies.

Study targets:

Gaining knowledge about the current and future development of systems on a chip, the integration of on-chip, electrical and non-electrical action systems, usage of basic physical phenomena for applications in electronics, optics, communications, medicine and aviation, in the realization of miniature generators from renewable energy sources - excluding the photovoltaics.

Course outlines:

1. Microsystems structures, energy domains, importance, interdisciplinary, applications, system integration of digital and analog systems, multi-chip configuration
2. Physical phenomena, design methods, interconnection of systems-on-chip and external devices, process control, communication and evaluation, system reliability and its increasing by integration
3. Micro-actuators parameters, scaling
4. Tactile sensors and touch screens, biometric devices, from graphite to graphene
5. Basic mechanisms and structures used in micro-actuators
6. Electrostatic linear and rotary actuators components - basic physical principles and application
7. Electrostatic micromanipulators and micro-motors
8. Piezoelectric micro-actuators mechanisms, micro-motors and micromanipulators
9. Heat and magnetic principle - micro-actuators mechanisms
10. Mechanical Systems and micro-actuators mechanisms
11. Chemical and biochemical principles - micro-actuators mechanisms, intelligent microsystems structures for chemical and biochemical analysis, Lab-on-Chip
12. RF MEMS and MOEMS structures, (electronic switches, filters, optical switches, optical mirrors, tunable capacitors, etc.)
13. Micro-generators based on Energy Harvesting
14. Nanoscale systems

Exercises outline:

1. Introduction, organization of the seminars, introduction to safety in work
2. Semester project selection, registration for excursion
3. Introduction to the programs Coventor and Ansys
4. Simulation and modeling of basic MEMS structures in Ansys
5. Simulation and modeling of basic MEMS structures in Ansys
6. Simulation and modeling of basic MEMS structures in Ansys, Preparation for excursion
7. Excursion, practical exercise in clean rooms
8. Simulation and modeling of basic MEMS structures in Ansys
9. Laboratory exercise - Application of the material printer
10. Laboratory exercise - Characterization of the fabricated structures
11. Measurement - practical applications of the MEMS structures
12. Presentation of semester projects
13. Presentation of semester projects
14. Additional measurements: completion of missing measurement tasks, assessment


1. Fraden,J.: Handbook of modern sensors. American institut of physics, Woodbury 1997
2. Tuller,H.L, Microactuators, Kluwer 1998



Education range: 14 lectures + 14 exc


Microsystems, energy domains, system integration, multi-chip configuration, physical phenomena, design methods, system reliability, micro-actuators parameters, scaling, touchscreen, biometric components, graphene, actuating mechanism, electrostatic, micromanipulators, micro-motors, piezoelectric, thermal, magnetic, chemical, biochemical, Lab-on-Chip, MEMS, RF MEMS, Energy harvesting, nanoscale systems.

Subject is included into these academic programs:

Program Branch Role Recommended semester
MEEK1_2018 Electronics P 2
MEEK4_2018 Technology of the Internet of Things P 2

Page updated 17.7.2024 14:51:47, semester: Z/2024-5, L/2023-4, L/2024-5, Z/2023-4, Send comments about the content to the Administrators of the Academic Programs Proposal and Realization: I. Halaška (K336), J. Novák (K336)